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    • PVD PLATFORMS
      • Covap
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    • CVD PLATFORMS
      • LPCVD
    • INTEGRATION / CONNECTIVITY
      • Glove Box Integration
      • Cluster Integration
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PVD PLATFORMS

Covap

• SMALL BUT MIGHTY
• Fixturing supports up to 100mm x 100mm substrates
• QCM sensors carefully isolated to ensure there is no interference from adjacent source material

NEXDEP

• A COMPACT, ECONOMICAL, FULL FEATURED PVD WORKHORSE
• With its 400mm x 400mm baseplate
• Electron Beam Evaporation and Thermal Evaporation

AMOD

• With its 500mm x 500mm baseplate
• NOT TOO BIG, NOT TOO SMALL…IT’S JUST RIGHT
• Plasma & Ion Beam Processing
• Sputtering

EVOVAC

• Sputtering
• RF, DC, pulsed DC, HIPIMS, and reactive. Circular, linear & cylindrical cathodes are available.
• Electron Beam Evaporation

CVD PLATFORMS

LPCVD

• Designed and manufactured to meet the high temperature and rapid cooling
• THE TOOL YOU NEED TO STUDY AND UTILIZE GRAPHENE AND CARBON NANOTUBES

INTEGRATION / CONNECTIVITY

Glove Box Integration

• non-PVD and PVD processes to be connected within a controlled environment
• Total integration means that samples, in addition to the evaporated materials, can be loaded from the glovebox

Cluster Integration

• cluster specific sequencing algorithm within Aeres
• operate multi-module systems that can include cleaning stations, substrate and mask load locks