info@shahscientificsolutions.com

ANGSTROM Engineering


PVD PLATFORMS


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Covap
  • SMALL BUT MIGHTY
  • Fixturing supports up to 100mm x 100mm substrates
  • QCM sensors carefully isolated to ensure there is no interference from adjacent source material
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NEXDEP
  • A COMPACT, ECONOMICAL, FULL FEATURED PVD WORKHORSE
  • With its 400mm x 400mm baseplate
  • Electron Beam Evaporation and Thermal Evaporation
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AMOD
  • With its 500mm x 500mm baseplate
  • NOT TOO BIG, NOT TOO SMALL…IT’S JUST RIGHT
  • Plasma & Ion Beam Processing
  • Sputtering
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EVOVAC
  • Sputtering
  • RF, DC, pulsed DC, HIPIMS, and reactive. Circular, linear & cylindrical cathodes are available.
  • Electron Beam Evaporation

CVD PLATFORMS


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LPCVD
  • Designed and manufactured to meet the high temperature and rapid cooling
  • THE TOOL YOU NEED TO STUDY AND UTILIZE GRAPHENE AND CARBON NANOTUBES

INTEGRATION / CONNECTIVITY


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Glove Box Integration
  • non-PVD and PVD processes to be connected within a controlled environment
  • Total integration means that samples, in addition to the evaporated materials, can be loaded from the glovebox
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Cluster Integration
  • cluster specific sequencing algorithm within Aeres
  • operate multi-module systems that can include cleaning stations, substrate and mask load locks